Use-case

Meeting the need for further miniaturization and increased processing accuracy
Contributing to improved equipment performance
Semiconductor manufacturing process
In response to the demand for miniaturization and multi-layering of semiconductor chips, higher speed and higher
precision control is required in each manufacturing process.
Spin coaters

Chemical solutions are evenly spread by rotating the wafer.
The high-speed rotation contributes to increased thinness.
Max. motor rotational speed 7150 r/min
Dicing saws

By improving positioning accuracy, micro IC chips can be
formed from wafers.
Improved positioning accuracy
Chip transfer machines

Suppresses minute tip vibrations and realizes high-speed
pick & place of microscopic IC chips.
precAIse TUNING
Bonding equipment

High-response load control prevents mounting failures and
damage to microchips during substrate mounting.
Sensor direct feedback (Pressure control)
IC handlers

Abnormal stops due to overloading are reduced, even when quick acceleration/deceleration is repeated under high load conditions.
Extending overload operation time
Substrate inspection equipment

The dual axes of the gantry mechanism allow for smooth, high-speed operation, enabling high-speed inspection
High-precision gantry control
Processing machinery
As products become denser and more sophisticated, higher precision control is required for all machines, even
those that process the individual parts making up the product.
Metal processing machines

The high-response servo can increase the gain, enabling ultra-precise, nanometer-order machining.
Encoder resolution 27 bit
Velocity response frequency 4.0 kHz or more
Laser processing machines

High-quality machining is achieved by correcting unevenness
with regard to height with a high level of responsiveness.
Sensor direct connection auto-focus control
Press machines

Operation patterns for
high-response pressure control
can easily be constructed
without a host program.
Block operation function
Injection molding machines

High-response pressure control stabilizes filling pressure
and suppresses filling defects and burrs.
Sensor direct feedback (Pressure control)
Pipe bending machines

Both position control and
pressure control are fully
closed within the servo,
achieving high speed and
accurate bending.
Sensor direct feedback
(Pressure control)
