Use-case
Spin coaters
Chemical solutions are evenly spread by rotating the wafer.
The high-speed rotation contributes to increased thinness.
Max. motor rotational speed 7150 r/min
Dicing saws
By improving positioning accuracy, micro IC chips can be
formed from wafers.
Improved positioning accuracy
Chip transfer machines
Suppresses minute tip vibrations and realizes high-speed
pick & place of microscopic IC chips.
precAIse TUNING
Bonding equipment
High-response load control prevents mounting failures and
damage to microchips during substrate mounting.
Sensor direct feedback (Pressure control)
IC handlers
Abnormal stops due to overloading are reduced, even when quick acceleration/deceleration is repeated under high load conditions.
Extending overload operation time
Substrate inspection equipment
The dual axes of the gantry mechanism allow for smooth, high-speed operation, enabling high-speed inspection
High-precision gantry control
Metal processing machines
The high-response servo can increase the gain, enabling ultra-precise, nanometer-order machining.
Encoder resolution 27 bit
Velocity response frequency 4.0 kHz or more
Laser processing machines
High-quality machining is achieved by correcting unevenness
with regard to height with a high level of responsiveness.
Sensor direct connection auto-focus control
Press machines
Operation patterns for
high-response pressure control
can easily be constructed
without a host program.
Block operation function
Injection molding machines
High-response pressure control stabilizes filling pressure
and suppresses filling defects and burrs.
Sensor direct feedback (Pressure control)
Pipe bending machines
Both position control and
pressure control are fully
closed within the servo,
achieving high speed and
accurate bending.
Sensor direct feedback
(Pressure control)
